• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The invention relates to a method for producing an optical element from a base body having a first side face (113) which has a first, optical coating and at least one second side face (115, 115 ') which is not plane-parallel to the first side face and a second face , Optical coating, proposed with the steps: - Determining the voltage induced by the first, optical coating of the first side surface in the optical element; - Determining a counter-voltage, so that the resulting induced in the optical element total voltage is as low as possible; Determining the second, optical coating taking into account the determined countervoltage and the optical parameters of this second, optical coating; - applying the first optical coating on the first side surface (113); - Applying the second, optical coating on the at least one second side surface (115, 115 '). Advantageously, calculation methods of the finite element method are used.
    公开号:CH712550A2
    申请号:CH00674/17
    申请日:2017-05-24
    公开日:2017-12-15
    发明作者:Beder Christian；Zaczek Christoph；Gaber Erwin；Tonova Diana；Sundermann Michael
    申请人:Zeiss Carl Meditec Ag；
    IPC主号:
    专利说明:

    Description: The present invention relates to a method for producing an optical element from a base body having a first side face, which has a first, optical coating, and at least one second side face, which is not plane-parallel to the first side face and a second, having optical coating. Further, it relates to an optical element manufactured by this method.
    In optical elements having an optical coating on their base body, it is known that the optical coating can cause compressive or tensile stresses. The thicker the optical coating is and in particular the higher the number of layers of the optical coating, the greater the voltage produced. These stresses lead to deformations of the body, which may manifest as wavefront deformations, for example.
    For cuboid optical elements, such as Fabry-Perot interferometers, for example, from the article by Marie-Maude de Denus-Baillargeon et al., Applied Optics, Volume 53, No. 12, p 2616ff. It is known either to optimize the optical coating itself in such a way that the stress exerted by it is as small as possible or, in the simplest case, to apply an identical coating on the side opposite the coated side, so that the stresses cancel each other out. To find suitable coatings, the authors take i.a. back to calculation methods of the finite element method.
    From DE 10 2011 079 933 A1 is known, in optical elements for UV or EUV lithography, which have a functional coating on a first side of a substrate, on a second side, with the first side of a common Edge also has to provide a coating whose thickness and stress are chosen such that the quotient of the product of the thickness and stress of the functional coating by the product of the thickness and tension of the coating of the second side in a value range between 0.8 and 5 , 0 is. In particular, all sides that share a common edge with the first edge are coated for stress compensation.
    It is an object of the present invention to provide a method for producing optical elements, in which the deformations of the base body, which are caused by an optical coating, are reduced.
    This object is achieved by a method for producing an optical element from a base body having a first side surface, which has a first, optical coating, and at least one second side surface, which is not plane-parallel to the first side surface and a second, optical coating comprising the steps of: determining the voltage induced by the first optical coating of the first side surface in the optical element; - Determining a counter-voltage, so that the resulting induced in the optical element total voltage is as low as possible; Determining the second, optical coating taking into account the determined countervoltage and optical parameters of this second, optical coating; Applying the first optical coating on the first side surface; - Applying the second optical coating on the at least one second side surface.
    In optical elements having at least two side surfaces which are not plane-parallel to each other, as may be the case for example with optical elements, the Grundköper is prism-shaped or substantially formed as a wedge-shaped plates, or in any polyhedra, where at least An edge angle is not equal to 90 °, there is the problem that the known from the prior art approaches, such as on an opposite side surface apply an identical coating or adjacent side surfaces to provide with any coatings, provided that sufficient stress compensation is achieved, not readily are applicable. The problem is aggravated when one or more of the side surfaces of the optical element is curved.
    It should be noted that it is in the induced by the first, optical coating of the first side surface tension and the counter-tension to mechanical stresses, in particular pressure and / or tensile stresses.
    It has been found that the complexity of manufacturing even those optical elements with more complicated geometry with as few deformations becomes manageable by the problem of selecting suitable optical coatings is divided into several sub-problems, which are successively solved. According to the procedure proposed here, one first selects a side surface with its optical coating, as it were, as the main side surface or main coating. For this purpose, the side surface is preferably chosen, the optical coating of which, for example because of its thickness or a large number of individual layers, will presumably cause the greatest stresses. Based on this first optical coating, it is more precisely determined which voltage is actually to be expected or occurs. This can i.a. be determined by simulation calculations or measurements on corresponding prototypes of the optical element. On the basis of these results, it can be calculated which counter tension would be necessary in order to counteract the stress caused by the first optical coating as well as possible. The countervoltage thus determined serves, in addition to the optical parameters, as a boundary condition in order to produce a second, optical
    Select layering before first applying the first, optical and then the second, optical coating on the respective side surfaces. Already in the calculation of the counter-tension, it may be advantageous to consider over which edge region and at what angle the first and second side surfaces adjoin one another. Should the choice of materials for the second optical coating be limited due to the optical parameters, the mechanical properties of the materials in question are preferably taken into account when determining the second, optical coating. Overall, it may be advantageous to determine non-optical parameters such as mechanical minimum stability or the like when determining the second coating. to take into account.
    When determining the countervoltage, it is preferably taken into account that the RMS value of the first side surface and / or the second side surface with the respective coating is limited to a maximum of 10% of the main wavelength or its Strehl value or its Strehlwerte is at least 0.8 or lie , By taking into account one or both parameters, the goal of a sufficiently small deformation of the body at the corresponding side surface can be achieved for many optical applications. The RMS value is the mean square deviation of the actual surface course from the ideal surface course. For example, the mean wavelength of the wavelength range occurring during operation of the optical element can be selected as the main wavelength. If it is known that a certain intensity distribution is present within the wavelength range, it is possible, for example, to start from the correspondingly weighted arithmetic mean value instead of the arithmetic mean value. The Strehl value is determined by comparing the intensity of the diffraction disc of an optical element with the intensity of the diffraction disc of the corresponding ideal optical element. The theoretically best possible quality is set equal to 1.
    Advantageously, calculation methods of the finite element method are used for determining the countervoltage and / or induced by the first, optical coating of the first side surface in the optical element voltage and / or the determination of the second, optical coating. The finite element method has become a tried and tested method for detecting mechanical properties of even more complex objects.
    Preferably, after application of the first optical coating on the first, side surface and the second optical coating on the at least one second side surface, the total voltage actually induced in the optical element is determined experimentally, compared with the target total voltage and in case of excessive deviation the first, optical coating and / or second, optical coating and / or another side surface of the optical element processed locally. In this way, deformation effects which might not have been taken into consideration, for example, in the calculation of the countervoltage generated by the first, optical coating and / or second optical coating, such as e.g. Manufacturing tolerances are corrected. In the case of local reworking, it is advantageously ensured in the case of optical coatings that any material thickness changes do not cause unwanted changes in the optical properties of the optical coating. Particularly preferably, the local processing is carried out by means of magnetorheological polishing or ion beam polishing. Using these methods, it is possible to remove material from the coating surface in a particularly precise and easily controllable manner, even over small areas in the micrometer range.
    In preferred embodiments, moreover, the base body of the optical element is modified. In particular, in edge regions in which, due to a small angle between the two possibly adjoining side surfaces and the correspondingly small amount of base material, it may be difficult to compensate for the tension caused by the first optical coating by means of second optical coatings Reducing the deformation of one or both side surfaces may be helpful in providing additional body material there.
    The optical coatings can be applied to the base body by means of all hitherto customary physical and / or chemical processes for deposition from the gas phase. With regard to a good reproducibility of the thicknesses of the individual layers of the optical coating, they are preferably applied by means of sputtering. In addition, ion- or plasma-assisted physical vapor deposition processes are well suited. In particular, it is possible to resort to an ion-assisted or plasma-assisted sputtering method.
    Furthermore, the object is achieved by an optical element which has been produced by the method proposed here.
    In preferred embodiments, the at least one second side surface adjoins the first side surface.
    In particularly preferred embodiments, the base body or a subunit of the base body is formed as a prism or wedge-shaped plate. Prism is to be understood in this context as a geometric prism. The wedge-shaped plate may lack the portion of a wedge corresponding to the tapered edge portion.
    Preferably, the optical element has a first or second optical coating, which is formed as an antireflection layer, as a reflection layer or as a filter layer. In particular, the filter layer may be a fluorescence filter, a polarization filter, a notch filter, a bandpass filter, a shortpass filter or a longpass filter.
    Advantageously, the optical element is designed for use in the infrared and / or visible wavelength range. Optical coatings for these wavelength ranges could be significantly thicker than for example for the ultraviolet or extreme ultraviolet wavelength range and thereby cause much greater stresses and deformations of the base body of the optical element or of the optically used side surface (s). Thus, a preparation according to the proposed method is particularly advantageous.
    Overall, the optical element depending on the design application as u.a. Find polarizer, optical prism, beam splitter, beam combiner or mirror.
    The present invention will be explained in more detail with reference to preferred embodiments. Show this
    Fig. 1 shows schematically a first beam splitter in side view;
    2 schematically shows a second beam splitter in side view;
    3 shows schematically the second beam splitter in plan view;
    4a shows the deformation of a first side surface of a rhombic prism of the second beam splitter with a first optical coating;
    4b shows the deformation of the first side surface of the rhombic prism of the second beam splitter with additionally second optical coating on an adjoining second side surface; and
    5 shows the sequence of an embodiment of the proposed production method.
    In Fig. 1, a first beam splitter 101 is shown schematically in side view. It is composed of a first prism 205 and a second prism 103, which have an equilateral triangle as their base. The second prism 103 has no optical coatings. The first prism 105 has an optical coating on its side face 113, which serves as a beam splitter layer and transmits light in the visible wavelength range with an incident beam 107, so that it passes through the prism 103 as a partial beam 111 and reflects light in the infrared wavelength range, so that it is coupled out as a partial beam 109 and exits from the prism 105. In addition, the side surfaces 115 and 115 'adjoining the side surface 113 have an optical coating which serves as an antireflection layer so that as little as possible intensity is lost when the beam 107 enters the side surface 115 and the partial beam 109 exits through the side surface 115'.
    Since the beam splitter layer is many times thicker than a conventional antireflection layer and thus it is expected that a greater stress on the first prism 105 is exerted by the beam splitter layer than by the antireflection layers, the voltage was first determined, the beam splitter layer on the first prism 105 is exerted, as well as which counter-tension is necessary in order to compensate for them such that both at the side surface 113 and at the side surfaces 115, 115 'a Strehl value of 0.79 is maintained. The side surface 113 was thus treated as a first side surface. Taking into account the countervoltage thus determined and the optical limits to be observed for a low reflection in the visible to infrared wavelength range, the layer design of the antireflection layers for the side surfaces 115, 115 'was determined. The side surfaces 115, 115 'were thus treated as two second side surfaces. In the example shown here it was possible to combine a conventional antireflective coating with an additional optically neutral silicon dioxide layer. The pre-determined beam splitter layer was applied to the side surface 113 of the first prism 105 and then the antireflective coatings added around the silicon dioxide layer to the adjacent side surfaces 115, 115 '.
    In Fig. 2, a second beam splitter 201 with a first prism 205 and a second prism 203 is shown schematically in side view. In contrast to the beam splitter illustrated in FIG. 1, the beam splitter 201 has the first prism optically relevant for the beam splitting formed as a rhombic prism 205. As a result, the side surfaces 215, 216 adjoining the side surface 213 with the beam splitter layer form different angles with the side surface 213. The side surface 215 forms with a side surface 213 an angle α of less than 90 °, while the side surface 216 with the side surface 213 forms an angle ß of greater than 90 °.
    In the beam splitter 201 described here, a light beam 207 incident through the side surface 216 is first reflected at the side surface 212 to an incident light beam 207 ', which on the side surface 213 by the beam splitter layer located there in a transmitted partial beam 211 with wavelengths in the visible wavelength range and a reflected sub-beam 209 with wavelengths in the infrared wavelength range, which exits through the side surface 215, which should therefore have an antireflection layer.
    In the example shown in FIG. 2, the beam splitter layer consists of alternating layers of niobium oxide and aluminum oxide whose individual layer thicknesses vary between 10 nm and 200 nm and add up to a total layer thickness of approximately 11000 nm. This beam splitter layer has a transmission rate of greater than 99% at incident angles of 45 ° ± 3 ° for wavelengths between 400 nm to 700 nm and for wavelengths between 800 nm to 900 nm a reflection rate of greater than 98%, also at angles of incidence of 45 ° ± 3 °. Since conventional antireflection layers suitable for the side surface 215 have overall layer thicknesses of just under 1000 nm, the beam splitter layer was used as the first optical coating and the side surface 213 as the first side surface, and with the help of FEM (Finite Element Method) computation methods was used calculates the voltage induced by the beam splitter layer. It is a compressive stress of about 2500 GPa, which is distributed very unevenly over the surface of the side surface 213 in a substrate made of quartz glass. The side surface 213 has dimensions of about 1.6 cm x 2.4 cm. The thus induced deformations of the side surface 213 are shown in Fig. 4a as Flöhenlinienzeichnung, for the illuminated on the side surface 213 of the incoming beam surface 401. The drawn contour lines correspond to fleas differences of 40 nm, with the exception of the elliptical contour line, the fleas deviation of 30 nm corresponds. The two L-shaped contour lines drawn in area 405 are the onm lines. In the region 403, where the side surface 213 has a common edge with the side surface 215 and particularly little substrate material is present, the surface course deviates up to 400 nm from the ideal surface.
    For this stress distribution, a suitable countervoltage was determined when coating the side surface 215 with the proviso of an RMS value of the side surface 213 of not more than 9% of the central wavelength of 650 nm. In order to achieve a better stress compensation, a coating with optically neutral material, in this case silicon dioxide, on the side surface 216 was additionally included in the FEM calculations. The side surface 213 has thus been treated as a first side surface and the side surfaces 215, 216 as two different second side surfaces.
    The result flowed into the layer design of the antireflection layer for the side surface 215. There were chosen alternately arranged layers of niobium oxide and silicon dioxide whose individual layer thicknesses vary between 10 nm and 150 nm and add up to a total thickness of about 7 microns. In addition, the thickness of some 100 nm of the silicon dioxide compensation layer was determined on the side surface 216, with a thickness profile selected from the maximum at the edge to the side surface 213 to minimally at the opposite edge. In variants, it is also possible to work with a constant thickness or even one of the optical coatings has a thickness profile.
    However, it was also to be noted that the lateral surfaces 217, 217 'which are perpendicular to the side surfaces 215, 216 and which are shown in FIG. 3, a schematic plan view of the rhombic prism 205, can not be coated for manufacturing reasons. In order to still be able to meet the required RMS value, the substrate on the side surface 213 has been modified in such a way that in each case a material lead 219 is provided at the two edges to the side surfaces 217, 217 '. By means of this measure, it was possible to exert a positive influence on the saddle-shaped deformation in the area 405 of the illuminated area 401 in FIG. 4a.
    After applying the beam splitter layer on the side surface 213 of the modified prism substrate by magnetron sputtering and then the antireflection coating on the side surface 215 and the compensation layer on the side surface 216, also by magnetron sputtering, the deformation of the side surface 215 in the region of the beam spot 401 was measured interferometrically. The result is shown in Fig. 4b. As in FIG. 4a, the contour lines each correspond to a height difference of 40 nm. Only in the outermost edge region of the beam spot 401 in the region 403 is a height difference of more than 100 nm achieved. The RMS value over the area of the beam spot 401 is approximately 8.5% of the central wavelength.
    An exemplary embodiment of the method proposed here for producing optical elements for the body having a first side surface, which have a first, optical coating, and at least one adjacent second side surface, which have a second, optical coating, is based on of Fig. 5 explained.
    In a first method step 501 "Determining a fundamental voltage by means of FEM", FEM is used to calculate the basic voltage which is caused by the first, optical coating on the first side surface. Alternatively, one could also produce a test element from the base body of the planned optical element and only the first optical coating on the first side surface and experimentally determine the deformation of the first side surface induced by the voltage applied by the first optical coating. In addition, in step 503, "determining a second area" is defined, which is the second side surface (s) to be provided with a second optical coating which at least partially determines the stress caused by the first optical coating compensated. If, for manufacturing reasons, the number of second side surfaces is limited, one or more side surfaces adjoining the first side surface are preferably selected which form an angle of less than 90 ° with the first side surface.
    From the determined base voltage and taking into account the position of the second (n) side surface (s) is calculated in the present example by means of FEM, at which counter tension an RMS value of less than 10% of the central wavelength for all with optical coatings providing side surfaces and optionally other optically used side surfaces can be met (step 505 «Determining a counter tension by means of FEM, where RMS <0.1 * Ac).
    On the basis of this information, and taking into account the optical parameters to be observed, the design of the second optical coating is selected (step 507 "Determining the second coating taking into account the reverse voltage and optical parameters") and first the first optical coating and then the second, optical coating is preferably applied to the respective side surfaces of the optical element by sputtering (steps 509, "applying the first coating", step 511, "applying the second coating").
    After coating the base body, the total voltage actually induced in the optical element is determined experimentally in step 513 "Measurement of the wavefront" by measuring the wavefront of the light beams passing or reflected through the optically used side surfaces in the present example. From this, it is concluded that the total voltage actually present across the respective areas is compared with the desired total voltage. If the deviation is too great, the optical coatings or possibly the surface of an optically used but uncoated side surface are locally reworked where necessary, in particular by means of magneto-torheological polishing or ion beam polishing (step 515 "local reworking, if necessary"). These two steps are particularly helpful in more complex geometries of the optical element to be produced, such as curved surface curves. In simulation calculations, it is not always possible to consider all interactions that can lead to specific stress gradients due to optical coatings at all or with sufficient accuracy, so that with high-precision optical elements, checking and correcting them can lead to better results.
    It should be noted that while the invention has been explained with reference to optical elements in which the first and the at least one second side surface adjoin one another, but the examples can be easily transferred to any optical elements in which the first and the at least one second side surface are not plane-parallel to each other. In addition, they can be transferred to any application such as polarizer, fluorescence filter, beam combiner, etc. Depending on the specific design of the optical element may also be one or more without optical function in several second coatings.
    101 beam splitter 103 second prism 105 first prism 107 incident beam 109 reflected beam 111 transmitted beam 113 side surface 115, 115 'side surfaces 201 beam splitter 203 second prism 205 rhombus prism 207, 207' incident beam 209 reflected beam 211 transmitted beam 212 side surface 213 Side surface 215 Side surface 216 Side surface 217,217 'Side surface 219 Front 401 Beam spot 403 Area 405 Area
    权利要求:
    Claims (12)
    [1]
    501-515 process steps α, ß angle claims
    A method of manufacturing an optical element from a base body having a first side surface having a first optical coating and at least one second side surface which is not plane parallel to the first side surface and having a second optical coating, comprising the steps of: Determining the voltage induced by the first optical coating of the first side surface in the optical element; - Determining a counter-voltage, so that the resulting induced in the optical element total voltage is as low as possible; Determining the second, optical coating taking into account the determined countervoltage and the optical parameters of this second, optical coating; Applying the first optical coating on the first side surface; - Applying the second optical coating on the at least one second side surface.
    [2]
    2. The method according to claim 1, characterized in that the second coating is determined on the condition that the RMS value of the first side surface and / or the second side surface with respective coating is limited to a maximum of 10% of the main wavelength and / or its Strehlwert or their Strehlwerte is at least 0.8 or lie.
    [3]
    3. The method according to claim 1 or 2, characterized in that for determining the counter-voltage and / or induced by the optical coating of the first side surface in the optical element voltage and / or the determination of the second coating calculation methods of the finite element method can be used ,
    [4]
    4. The method according to any one of claims 1 to 3, characterized in that after applying the first, optical coating on the first side surface and the second, optical coating on the at least one second side surface, the actual induced voltage in the optical element is determined experimentally, with the desired total voltage is compared and in the case of too great a deviation, the first, optical coating and / or the second, optical coating and / or a further side surface of the optical element is processed locally.
    [5]
    5. The method according to claim 4, characterized in that the local processing is carried out by means of magnetorheological polishing or ion beam polishing.
    [6]
    6. The method according to any one of claims 1 to 5, characterized in that the basic body of the optical element is modified.
    [7]
    7. The method according to any one of claims 1 to 6, characterized in that the optical coatings are applied by io-nen- or plasma-assisted physical deposition from the gas phase or by sputtering.
    [8]
    8. An optical element produced by the method according to one of claims 1 to 7.
    [9]
    9. An optical element according to claim 8, characterized in that the at least one second side surface is adjacent to the first side surface.
    [10]
    10. An optical element according to claim 8 or 9, characterized in that the base body or a subunit of the base body is designed as a prism (105, 205) or wedge-shaped plate.
    [11]
    11. An optical element according to any one of claims 8 to 10, characterized in that it comprises a first or second optical coating, which is designed as an antireflection layer, as a reflection layer or as a filter layer.
    [12]
    12. Optical element according to one of claims 8 to 11, characterized in that it is designed for use in the infrared and / or visible wavelength range.
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    法律状态:
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